主要特征

■ Model RLS-3102

■ Wafer   Plain 300mm  

■ Cassette  FOUP/FOSB  

■ Docking stroke  0 ~ 70mm 

■ Latch motion  90° ± 0.5° 

■ Operation Time With Mapping  <13 sec 

■ RFID RS 232C

■ Vacuum supply Ø4 one touch fitting 

■ Air supply Ø4 one touch fitting 

■ Interface  RS232C

■ MTBF ≥ 20,000 hour

■ MTTR ≤ 1 hour

■ Repeatability  ≤±0.1mm 

■ Operating Temperature  0℃~40℃ 

■ Operating  Humidity  30% ~ 80%

■ Stable Temperature  -10℃~70℃ 

■ Stable  Humidity  0% ~ 93%